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구분 /모델
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Wafer size
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200mm, 150mm (SEMI and JEIDA Standard) |
6, 5 and 4 inches |
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Wafer cassette
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Standard : PA182-60MB-06XX for 150mm
PA192-80MB-06XX for 200mm |
Fluoroware®H-BAR type housing |
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Number of wafers
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25 wafers (6-inch), 25 or 26 wafers (8-inch) |
25 wafers |
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Inspection mode
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1. Micro Inspection Mode
2. Micro + Macro Inspection Mode
3. Micro + Macro + Back-side Macro (for Edge)
Inspection Mode
4. Micro + Macro + Back-side Macro (for Center)
Inspection Mode
5. Micro + Macro + Back-side Macro (for Edge &
Center)
Inspection Mode |
1. Micro inspection
2.Tilt macro inspection |
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Wafer transfer
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Robotic transfer with vacuum
chuck
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Pre-alignment
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Non-contact pre-alignment
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Orientation flat
/notch detection
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By transmitted-type sensor /
increments of 90˚ degree
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Stage
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Dedicated stage (rotatable 360
˚ ; with vacuum chuck)
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카달로그
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제품 주요규격 및 특징
